IWAKI FA Semiconductor Bellows Pump

IWAKI FA Pump

For high purity chemical handling aplications in semiconductor processing applications

The F-series includes pneumatic drive bellows pumps that are designed for use in the semiconductor manufacturing process. Iwaki introduced the first designs over 20 years ago and has continually developed new products to keep up with rapidly changing market needs. With over 20 different models available, the quality and performance of our products has made them the preferred solution by device manufacturers all over the world.


Contamination free design

All liquid end parts are made of fluoro resin with best resistance against heat and aggressive chemicals. Fiercely corrosive liquids are transferred safely without particulate emission.

Sensor drive system

By using internal proximity switches the sensor drive system opens / closes the solenoid. A reliable operation with stability even in case of a low stroke rate are ensured.

For the single wafer processing we offer with the FA-2E a lateral type for low flow rates equipped with a spray system. With the FA-40VEW, a vertical type for high flow rates, wafer up to 200 / 300 mm can be cleaned.

Excellent resistance against high pressures offer the thick bellows in H-shape (FA-40VEW) and guarantee a long life time for continous operation. In case of using special pump driver, the discharge can be easily controlled and monitored.

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Key information

MAX FLOWMAX HEADMAIN MATERIALSMax stroke speedTEMP RANGE
2,400 l/h
0.4 MPa
PTFE, PFA
150 spm
5 to 100°C

Pneumatic drive bellows pumps FS series

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Training

Onsite training

We offer customised training at your offices or onsite. Our goal is to maximise the efficiency for your engineering team during troubleshooting, minimising downtime. We concentrate on installation, product connectivity, and maintenance. For more information, please contact us and outline your team's specific needs.

Virtual training

In a fast-paced environment, we recognise the value of bite-sized training, especially when project teams are dispersed onsite or across different locations. To minimise time away from facilities, we provide intensive product training through video conferencing. For further details, please contact us and outline your team's specific needs.

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Sensys Ltd

Head Office
Unit 9 Pond Close
Walkern Road
Stevenage
Hertfordshire
SG1 3QP
United Kingdom

01438 759 595
enquiries@sensys.co.uk

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