IWAKI FS Semiconductor Bellows Pump

IWAKI FS Pump

For high purity chemical handling applications in semiconductor processing

The F-series includes pneumatic drive bellows pumps that are designed for use in the semiconductor manufacturing process. Iwaki introduced the first designs over 20 years ago and has continually developed new products to keep up with rapidly changing market needs. With over 20 different models available, the quality and performance of our products has made them the preferred solution by device manufacturers all over the world.


High speed strokes

As a result of reducing size, weight and costs the stroke rate could be increased up to 240 spm. Additionally the occuring pulsation could be minimised. Depending on the pump type the stroke rate differs.

Contamination free design

All liquid end prats are made of fluoro resin. The pump is so designed that no metal portion is exposed. Even the exterior is coated with fluor resin. The use of a shaft seal (patent pending) has the effect of a remarkable decrease of particulate emission.

Wide range of liquid temperatures / high pressure discharge

Liquids with temperatures from 5 to 180°C and a pressure up to 0.5 MPa can be handled. The pump can be used washing-, CMP- or chemical circulation processes.

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Key information

MAX FLOWMAX HEADMAIN MATERIALSMax stroke speedTEMP RANGE
6,000 l/h
0.5 MPa
PTFE, PFA
240 spm
5 to 180°C

Pneumatic drive bellows pumps FS series

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Training

Onsite training

We offer customised training at your offices or onsite. Our goal is to maximise the efficiency for your engineering team during troubleshooting, minimising downtime. We concentrate on installation, product connectivity, and maintenance. For more information, please contact us and outline your team's specific needs.

Virtual training

In a fast-paced environment, we recognise the value of bite-sized training, especially when project teams are dispersed onsite or across different locations. To minimise time away from facilities, we provide intensive product training through video conferencing. For further details, please contact us and outline your team's specific needs.

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Sensys Ltd

Head Office
Unit 9 Pond Close
Walkern Road
Stevenage
Hertfordshire
SG1 3QP
United Kingdom

01438 759 595
enquiries@sensys.co.uk

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