The F-series includes pneumatic drive bellows pumps that are designed for use in the semiconductor manufacturing process. Iwaki introduced the first designs over 20 years ago and has continually developed new products to keep up with rapidly changing market needs.
With over 20 different models available, the quality and performance of our products has made them the preferred solution by device manufacturers all over the world.
High speed strokes
As a result of reducing size, weight and costs the stroke rate could be increased up to 240 spm. Additionally the occuring pulsation could be minimised. Depending on the pump type the stroke rate differs.
Contamination free design
All liquid end prats are made of fluoro resin. The pump is so designed that no metal portion is exposed. Even the exterior is coated with fluor resin. The use of a shaft seal (patent pending) has the effect of a remarkable decrease of particulate emission.
Wide range of liquid temperatures / high pressure discharge
Liquids with temperatures from 5 to 180°C and a pressure up to 0.5 MPa can be handled. The pump can be used washing-, CMP- or chemical circulation processes.