The F-series includes pneumatic drive bellows pumps that are designed for use in the semiconductor manufacturing process. Iwaki introduced the first designs over 20 years ago and has continually developed new products to keep up with rapidly changing market needs.
With over 20 different models available, the quality and performance of our products has made them the preferred solution by device manufacturers all over the world.
Contamination free design
All liquid end parts are made of fluoro resin with best resistance against heat and aggressive chemicals. Fiercely corrosive liquids are transferred safely without particulate emission.
Sensor drive system
By using internal proximity switches the sensor drive system opens / closes the solenoid. A reliable operation with stability even in case of a low stroke rate are ensured.
The adoption of thick bellows enables pressures up 0.45 MPa. Furthermore the life time of the bellows is 3 to 4 times longer than of a diaphragm. Pumps of the FW series are used in cleaning-, CPM- or chemical circulation processes.
The suction and discharge fittings are made of PFA. Due to the integrated construction the accumulation of particles is avoided. In case of using special pump driver, the discharge can be easily controlled and monitored.