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Iwaki F-series Semiconductor Bellows Pump
For high purity chemical handling applications in semiconductor processing
The F-series includes pneumatic drive bellows pumps that are designed for use in the semiconductor manufacturing process. Iwaki introduced the first designs over 20 years ago and has continually developed new products to keep up with rapidly changing market needs. With over 20 different models available, the quality and performance of our products has made them the preferred solution by device manufacturers all over the world.
High speed strokes
As a result of reducing size, weight and costs the stroke rate could be increased up to 240 spm. Additionally, corrupting pulsation is minimised. Depending on the pump type the stroke rate differs.
Contamination free design
All liquid end parts are made of fluororesin. The pump is so designed that no metal portion is exposed. A number of F-series pumps have fluororesin exteriors. The use of a shaft seal (patent pending) has the effect of a remarkable decrease in particulate emissions.
Wide range of liquid temperatures / high pressure discharge
Liquids with temperatures from 5 to 180°C and pressures up to 0.5 MPa can be handled. F-series pumps can be used in wafer wet-bench cleaning (batch/ single), chemical supply equipment, CMP process; mixed-liquid circulation/ transfer and cleaning.
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Key information
| MAX FLOW | MAX PRESSURE | MAIN MATERIALS | Max stroke speed | TEMP RANGE |
|---|---|---|---|---|
100 L/min | 0.5 MPa | PTFE, PFA | 240 spm | 5 to 180°C |
Product Range:
FS
FW
FA
Pneumatic drive bellows pumps F series
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Training
Onsite training
We offer customised training at your offices or onsite. Our goal is to maximise the efficiency for your engineering team during troubleshooting, minimising downtime. We concentrate on installation, product connectivity, and maintenance. For more information, please contact us and outline your team's specific needs.
Virtual training
In a fast-paced environment, we recognise the value of bite-sized training, especially when project teams are dispersed onsite or across different locations. To minimise time away from facilities, we provide intensive product training through video conferencing. For further details, please contact us and outline your team's specific needs.
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Sensys Ltd
Head Office
24 Vision Park
Preston Place
Upper Caldecote
Biggleswade
SG18 9GQ
what3words: ///uptown.wisley.guests
01438 759 595
enquiries@sensys.co.uk
Preston Place
Upper Caldecote
Biggleswade
SG18 9GQ
what3words: ///uptown.wisley.guests
01438 759 595
enquiries@sensys.co.uk
