The F-series includes pneumatic drive bellows pumps that are designed for use in the semiconductor manufacturing process. Iwaki introduced the first designs over 20 years ago and has continually developed new products to keep up with rapidly changing market needs.
With over 20 different models available, the quality and performance of our products has made them the preferred solution by device manufacturers all over the world.
Contamination free design
All liquid end parts are made of fluoro resin with best resistance against heat and aggressive chemicals. Fiercely corrosive liquids are transferred safely without particulate emission.
Sensor drive system
By using internal proximity switches the sensor drive system opens / closes the solenoid. A reliable operation with stability even in case of a low stroke rate are ensured.
For the single wafer processing we offer with the FA-2E a lateral type for low flow rates equipped with a spray system. With the FA-40VEW, a vertical type for high flow rates, wafer up to 200 / 300 mm can be cleaned.
Excellent resistance against high pressures offer the thick bellows in H-shape (FA-40VEW) and guarantee a long life time for continous operation. In case of using special pump driver, the discharge can be easily controlled and monitored.