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Iwaki CFD Chemical Replenishing Pump
This chemical fluid dispensing pump (CFD) is designed to handle wafer liquid of enhanced purity
The resolution of CFD has been greatly improves compared to our existing models. The minimum flow of 1mL/shot offers greate accuracy in chemical condensation control that is required in the wafer cleaning process. The anti-siphon mechanism prevents unintentional siphoning.
Corrosion resistant wet ends
Fluoroplastic wet ends (PTFE, PFA, PTCFE) is capable of handling the strong acids, alkaline and hydrogen peroxide required for semiconductor processing. PFTE, PFA, PP, PVC external parts and PTFE coated screws provide additional protection against chemical attack.
Flow rate adjustment
Simply open the bottom cover to easily adjust stroke length to give between 1.0-2.7ml/shot. (Factory default is 1.0ml/shot)
Downloads
Key information
| MAX FLOW | MAX HEAD | MAIN MATERIALS | Max stroke speed | TEMP RANGE |
|---|---|---|---|---|
1 mL/shot | 0.5 MPa | PTFE, PFA, PCTFE | 150 spm | 20 to 60°C |
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Help?
Technical Support Hotline
Feel free to contact our team for technical assistance while on-site or as needed by calling our hotline: 01438 759 595.
Our team is available to troubleshoot via remote access or guide you through the implementation of the solution by telephone or video link. Feel confident calling us anytime, as we are here to provide the support you need.
Our team is available to troubleshoot via remote access or guide you through the implementation of the solution by telephone or video link. Feel confident calling us anytime, as we are here to provide the support you need.
Ask the Experts
Great companies begin with great people. At Sensys, we take pride in our highly dedicated employees and the commitment they bring to delivering outstanding solutions to our customers.
Harness the team's expertise and know-how, boasting over 80 years of combined experience and advanced, dependable knowledge.
Harness the team's expertise and know-how, boasting over 80 years of combined experience and advanced, dependable knowledge.
Ask our Experts for Help
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Head Office
24 Vision Park
Preston Place
Upper Caldecote
Biggleswade
SG18 9GQ
01438 759 595
enquiries@sensys.co.uk
Preston Place
Upper Caldecote
Biggleswade
SG18 9GQ
01438 759 595
enquiries@sensys.co.uk
